VCM-S400
The VCM series modular vibration isolation system is a low-profile, cost-effective solution for SEM, FIB and dual beam.
The VCM series consists of vibration isolation bars and controllers. The vibration dampers use precision metal springs for passive vibration isolation and piezoelectric ceramic actuators for active vibration reduction. All components of the control system are enclosed in the body. It is easy to assemble and install, plug and play. It can adaptively adjust the foundation feedforward to achieve six degrees of freedom vibration reduction.
Description
Specifications & Models
| Model | VCM-S400 | VCM-S600 | VCM-D400 | VCM-D600 |
| Dimensions (mm) | 400*120*120 | 600*120*120 | 400*245*120 | 750*246*127 |
| Weight (kg) | 7.6 | 9.5 | 15.2 | 28 |
| Load (kg) | 150 | 150 | 300 | 300 |
| Scope of application | Light load | Light load | Medium load | Medium load |
| Vibration Isolation Technology | Based on piezoelectric sensors, the signal is quickly processed and the actuator is controlled to compensate for vibration interference. | |||
| Electronic system control | External control unit | |||
| Vibration isolation direction | Active compensation in six degrees of freedom | |||
| Active bandwidth | Frequency 1-100Hz | |||
| Response time | ≤30ms | |||
| Vibration isolation performance | >5Hz attenuation 90% >10Hz attenuation 95% | |||
| Maximum correction force | Vertical ±12N Horizontal ±8N | |||
| Working height adjustment method | Manual adjustment of the working height according to the weight of the load | |||
EXCELLENT VIBRATION ISOLATION PERFORMANCE
Effectively isolate vibrations from the ground, buildings or other external sources to ensure that the equipment remains stable at low frequencies. Avoid measurement errors and image blur caused by vibrations. In the 1-10HZ low-frequency band that affects ultra-precision measurement equipment, the active vibration isolation table has outstanding vibration isolation performance. It is equipped with advanced sensors and control systems, which can monitor and adjust the vibration isolation effect. It starts to isolate vibrations at 1HZ and can achieve 95% of the vibration isolation performance at 10HZ.
EXCELLENT PERFORMANCE IN A SMALLER PACKAGE
The VCM places the vibration isolation platform directly below the microscope frame, simplifying installation while maintaining approximately the same overall height and
EASY, WORKS RIGHT OUT OF THE BOX!
The VCM Series is a plug-and-play active vibration isolation system. Advanced feed-forward controls are available on all VCM models. These controls utilize real-time floor sensor measurements to detect and preempt vibrations before they reach the isolation mass. Dynamic controls seamlessly adapt to changing vibration levels and optimize themselves to ensure consistently excellent performance.
ACTIVE VIBRATION ISOLATION IN SIX DEGREES OF FREEDOM
The TA Series controls vibration in three degrees of translational motion (X, Y, and Z) and three degrees of rotational motion (pitch, roll, and yaw).
DOWNLOADS/PRODUCT GUIDES:
VCM-Series Products.pdf
